Product FeaturesVSS-GC cylinder cabinets have been developed to achieve fully-automated systems for safe and stable supply through an automatic verification system of the open-close status of the container valve. The technology reduces the number of the joints by minimizing the internal volume of the piping and realizes a high purification level by using vacuum generators to assist in the purging of the piping.
ApplicatiionsSpecialty gas supply unit for the manufacture of semiconductors, liquid crystals, and solar batteries
VSS-GC① No. of material gas containers (1–6) VSS-GC② Supply lines (1 or 2) VSS-GC③ O:Tightly sealed high pressure vessel without a purge vessel
H:Tightly sealed high pressure vessel
N:Tightly sealed high pressure vessel with a purge vessel
VSS-GC④ A:Non-polishing piping
US:Grinding piping + block valve
VSS-GC⑤ No mark: Stainless steel